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Einspruch, Norman G. [Author] ; Einspruch, Norman G. [Adapter]

Plazmennaja technologija v proizvodstve SBIS

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  • Media type: Book
  • Title: Plazmennaja technologija v proizvodstve SBIS
  • Work titles: Plasma processing for VLSI <russ.>
    Einspruch, Norman G.: Plasma processing for VLSI <russ.>
  • Contributor: Einspruch, Norman G. [Author]; Einspruch, Norman G. [Adapter]
  • Published: Moskva: Izd. Mir, 1987
  • Extent: 469 S.; Ill., graph. Darst
  • Language: Russian; English
  • Keywords: VLSI > Plasmatechnik > Halbleitertechnologie
  • Origination:
  • Footnote: In kyrill. Schr., russ

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Departmental Library DrePunct – stack

  • Shelf-mark: 0988 00180 001
  • Item ID: 32268644
  • Status: Loanable, place order
Delivery expected: 1 - 2 days after order