Media type: Book Title: Micro process engineering : fundamentals, devices, fabrication, and applications Contributor: Kockmann, Norbert [Hrsg.] imprint: Weinheim: Wiley-VCH, 2013 Published in: Advanced micro & nanosystems ; 5,2013 Extent: XXII, 507 S.; Ill., graf. Darst Language: English ISBN: 9783527335008 RVK notation: VN 7000 : Allgemeines Keywords: Mikroverfahrenstechnik Origination: Footnote: