Media type: Book Title: Microfabrication and nanomanufacturing Contributor: Jackson, Mark J. [Hrsg.] imprint: Boca Raton, Fla.[u..]: Taylor & Francis, 2005 Extent: 401 S.; Ill., graph. Darst Language: English ISBN: 0824724313; 9780824724313 RVK notation: ZN 3750 : Mikrosystemtechnik Keywords: Mikrosystemtechnik > Fertigungstechnik Origination: Footnote: Includes index
Departmental Library DrePunct – open access area Shelf-mark: ZN 3750 A182 Item ID: 31179509 Status: Loanable