Media type: Book Title: Fabrication engineering at the micro- and nanoscale Contributor: Campbell, Stephen A. [Author] imprint: New York [u.a.]: Oxford Univ. Press, 2013 Published in: Oxford series in electrical and computer engineering Issue: 4. ed. Extent: XIV, 671 S.; Ill., graph. Darst Language: English ISBN: 9780199861224 RVK notation: ZN 4900 : Allgemeines Keywords: Semiconductors Design and construction Origination: Footnote: Includes bibliographical references and index
Departmental Library DrePunct – open access area Shelf-mark: ZN 4900 C191(4) Item ID: 33734966 Status: Loanable