Media type: Book; Thesis Title: Excimerlasergestützte Technologien für die Mikroelektronik Contains: Literaturverz. S. 125 - 140 Contributor: Spieß, Walter [Author] Published: Düsseldorf: VDI-Verl., 1989 Published in: Verein Deutscher Ingenieure: Fortschrittberichte VDI / 9 ; 96 Issue: Als Ms. gedr. Extent: III, 142 S.; Ill., graph. Darst Language: German ISBN: 318149609X Keywords: Halbleitertechnologie > Excimerlaser Origination: University thesis: Zugl.: Darmstadt, TH, Diss. Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZN 1701-96 Item ID: 10361856 Status: Loanable
Departmental Library DrePunct – external stack Shelf-mark: 3038.8.2441 Item ID: 31527694 Status: Loanable, place order > Ordering possible ‒ please log in Delivery expected: 4 - 7 days after order