Media type: E-Book; Special Print Title: Nonevaporable getter-MEMS for generating UHV conditions in small volumina Contributor: Diekmann, Leonard Frank [VerfasserIn]; Kassner, Alexander [VerfasserIn]; Dencker, Folke [VerfasserIn]; Wurz, Marc Christopher [VerfasserIn] imprint: Hannover: Gottfried Wilhelm Leibniz Universität Hannover, 2022 Hannover: Technische Informationsbibliothek (TIB), 2022 Published in: Journal of vacuum science & technology : JVST : B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena ; 40 (2022), Nr. 5, 054202 Extent: 1 Online-Ressource Language: English DOI: 10.15488/13734 Identifier: Origination: Footnote: Access State: Open Access