Media type: Book Title: Silicon micromachining Contributor: Elwenspoek, Miko [Author]; Jansen, Henri V. [Author] imprint: Cambridge [u.a.]: Cambridge University Press, 1998 Published in: Cambridge studies in semiconductor physics and microelectronic engineering ; 700 Issue: 1. publ. Extent: XIII, 405 S; Ill., graph. Darst; 26 cm Language: English ISBN: 052159054x RVK notation: UQ 2800 : Kristallbearbeitung, Polieren, Ätzen ZN 4980 : Mikrocontroller, Signalprozessoren Keywords: Silicium > Mikromechanik > Mikrobearbeitung > Ätzen Origination: Footnote: Includes bibliographical references
Departmental Library DrePunct – open access area Shelf-mark: ZN 4136 E52 Item ID: 10364927 Status: Loanable
Departmental Library DrePunct – stack Shelf-mark: R2024 4 200 Item ID: 32414578 Status: Loanable, place order > Ordering possible ‒ please log in Delivery expected: 1 - 2 days after order