Media type: Book Title: Principles of plasma discharges and materials processing Contributor: Lieberman, Michael A. [Author]; Lichtenberg, Allan J. [Author] Published: New York, NY [u.a.]: Wiley, 1994 Published in: A Wiley-Interscience publication Extent: XXVI, 572 S.; Ill., graph. Darst Language: English ISBN: 0471005770 RVK notation: UR 8000 : Plasmaphysik allgemein Keywords: Plasmadynamik Plasmachemie Plasmaätzen Plasmadynamik > Dünnschichttechnik > Plasmastrahlbearbeitung > Plasmaätzen Origination: Footnote: Includes bibliographical references (S. 559 - 564) and index
Departmental Library DrePunct – open access area Shelf-mark: ZM 7680 L716 Item ID: 10085935 Status: Loanable