Media type: Book Title: Resolution enhancement techniques in optical lithography Contributor: Wong, Alfred Kwok-Kit [Author] imprint: Bellingham, Wash.: SPIE Press, c2001 Published in: Tutorial texts in optical engineering ; 47 Extent: XVII, 214 S; Ill., graph. Darst Language: English ISBN: 0819439959 RVK notation: ZN 4170 : Fotolithographie; Maskierung (Elektronenstrahllithographie; Röntgenstrahllithographie) Keywords: Integrierte Schaltung Lithografie Origination: Footnote: Literaturverz. S. 189 - 208
Departmental Library DrePunct – stack Shelf-mark: R2019 4 105 Item ID: 30630190 Status: Loanable, place order > Ordering possible ‒ please log in Delivery expected: 1 - 2 days after order