Media type: Book Title: CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications Contributor: Lange, Dirk [Author]; Brand, Oliver [Author]; Baltes, Henry [Author] imprint: Berlin; Heidelberg [u.a.]: Springer, 2002 Published in: Microtechnology and MEMS Physics and astronomy online library Extent: VIII, 142 S.; Ill., graph. Darst; 24 cm Language: English ISBN: 3540431438 RVK notation: ZN 4960 : MOS-, MIS-Schaltungen (hier auch CTD-Schaltungen; Eimerkettenschaltungen; CMOS-Schaltungen...) Keywords: Sensorsystem > CMOS > Rasterkraftmikroskopie > Gassensor Origination: Footnote: Literaturverz. S. [131] - 140
Departmental Library DrePunct – open access area Shelf-mark: ZN 4960 L274 Item ID: 30977802 Status: Loanable