Media type: Book Title: Micromachined thin-film sensors for SOI-CMOS co-integration Contributor: Laconte, Jean [Author]; Flandre, Denis [Author]; Raskin, Jean-Pierre [Author] imprint: Dordrecht: Springer, 2006 Extent: XIII, 292 S; Ill., graph. Darst Language: English ISBN: 0387288422; 9780387288420 RVK notation: ZQ 3120 : Sensortechnik; Sensoren allgemein Keywords: Dünnschichtsensor > CMOS Origination: Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZQ 3120 L142 Item ID: 31679677 Status: Loanable