Media type: Book Title: Silicon devices and process integration : deep submicron and nano-scale technologies Contributor: Kareh, Badih el- [Author]; El-Kareh, Badih [Other] imprint: New York, NY: Springer, 2009 Extent: XXV, 597 S.; graph. Darst Language: English ISBN: 0387367985; 9780387367989 RVK notation: ZN 4904 : Schaltungsentwurf Keywords: Halbleiterbauelement > Halbleitertechnologie > Bipolartransistor > MOS-FET > pn-Übergang > MOS > Nanometerbereich Origination: Footnote: Literaturangaben
Departmental Library DrePunct – open access area Shelf-mark: ZN 4904 E43 Item ID: 32094358 Status: Loanable