Media type: E-Book; Thesis Title: Particle dynamics simulation and diagnostics of the PECVD processes in fluorocarbon rf discharges Contributor: Barz, Jakob Philipp [Author] imprint: 2010 Extent: Online-Ressource Language: German ISBN: 9783868534672 Identifier: Keywords: Hochfrequenzplasma > Laserinduzierte Fluoreszenz > Simulation Origination: University thesis: Stuttgart, Univ., Diss., 2010 Footnote: Druckausg. beim Verl. Dr. Hut, München erschienen Access State: Open Access