Media type: E-Article Title: Scan performance of nanopositioning systems with large travel range Contributor: Hesse, Steffen [Other]; Schäffel, Christoph [Other]; Zschäck, Stephan [Other]; Ament, Christoph [Other]; Müller, Andreas [Other]; Manske, Eberhard [Other] Published: 2014 Published in: Ilmenauer Wissenschaftliches Kolloquium Nanomesstechnik und Prozessmesstechnik (2014 : Ilmenau): Shaping the future by engineering ; 2014 Language: English Identifier: Origination: Footnote: Access State: Open Access