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Drozd, V. E. [Editor]; Egorov, N. V. [Editor]; Nikiforov, K. A. [Editor] ; International Baltic Conference on Atomic Layer Deposition 14. 2016 Sankt Petersburg

2016 14th International Baltic Conference on Atomic Layer Deposition (BALD)

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  • Media type: E-Book; Conference Proceedings
  • Title: 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) : October 2-4, 2016, St. Petersburg, Russia : proceedings
  • Contributor: Drozd, V. E. [Editor]; Egorov, N. V. [Editor]; Nikiforov, K. A. [Editor]
  • Published: [Piscataway, NJ]: IEEE, 2016
  • Extent: 1 Online-Ressource; Illustrationen
  • Language: English
  • ISBN: 9781509034161
  • Keywords: Atomlagenabscheidung
  • Origination:
  • Footnote: Literaturangaben