Media type: E-Book; Thesis Title: Particle transport in technological plasmas Contributor: Trieschmann, Jan [Author]; Mussenbrock, Thomas [Other]; Awakowicz, Peter [Other] Published: Bochum: Ruhr-Universität Bochum, 2017 Extent: Online-Ressource Language: English Identifier: Keywords: Simulation ; Entladung ; Sputtern ; Kinetische Theorie ; Abscheidung ; Beschichten ; Hochschulschrift Origination: University thesis: Dissertation, Bochum, Ruhr-Universität Bochum, 2017 Footnote: Access State: Open Access