Media type: E-Article Title: Contrast distortion induced by modulation voltage in scanning capacitance microscopy Contributor: Chang, M. N.; Hu, C. W.; Chou, T. H.; Lee, Y. J. Published: AIP Publishing, 2012 Published in: Applied Physics Letters, 101 (2012) 8, Seite 083503 Language: English DOI: 10.1063/1.4747319 ISSN: 0003-6951; 1077-3118 Origination: Footnote: