Media type: E-Article Title: Understanding the microstructural evolution and mechanical properties of transparent Al-O-N and Al-Si-O-N films Contributor: Fischer, Maria; Trant, Mathis; Thorwarth, Kerstin; Crockett, Rowena; Patscheider, Jörg; Hug, Hans Josef imprint: Informa UK Limited, 2019 Published in: Science and Technology of Advanced Materials Language: English DOI: 10.1080/14686996.2019.1666425 ISSN: 1878-5514; 1468-6996 Keywords: General Materials Science Origination: Footnote: Access State: Open Access