Media type: E-Article Title: Diffusion phenomena in atomic layer deposition Contributor: Knez, Mato Published: IOP Publishing, 2012 Published in: Semiconductor Science and Technology, 27 (2012) 7, Seite 074001 Language: Without Specification DOI: 10.1088/0268-1242/27/7/074001 ISSN: 1361-6641; 0268-1242 Origination: Footnote: