Media type: E-Article Title: Piezoresistive cantilever working in a shear force mode forin situcharacterization of exposed micro- and nanostructures Contributor: Sierakowski, Andrzej; Kopiec, Daniel; Janus, Paweł; Ekwińska, Magdalena; Płuska, Mariusz; Grabiec, Piotr; Gotszalk, Teodor imprint: IOP Publishing, 2014 Published in: Measurement Science and Technology Language: Not determined DOI: 10.1088/0957-0233/25/4/044018 ISSN: 0957-0233; 1361-6501 Keywords: Applied Mathematics ; Instrumentation ; Engineering (miscellaneous) Origination: Footnote: