Media type: E-Article Title: Deep fused silica wet etching using an Au-free and stress-reduced sputter-deposited Cr hard mask Contributor: Steingoetter, Ingo; Fouckhardt, Henning imprint: IOP Publishing, 2005 Published in: Journal of Micromechanics and Microengineering Language: Not determined DOI: 10.1088/0960-1317/15/11/019 ISSN: 0960-1317; 1361-6439 Keywords: Electrical and Electronic Engineering ; Mechanical Engineering ; Mechanics of Materials ; Electronic, Optical and Magnetic Materials Origination: Footnote: