Media type: E-Article Title: Vacuum operation of comb-drive micro display mirrors Contributor: Manh, Chu Hoang; Hane, Kazuhiro Published: IOP Publishing, 2009 Published in: Journal of Micromechanics and Microengineering, 19 (2009) 10, Seite 105018 Language: Not determined DOI: 10.1088/0960-1317/19/10/105018 ISSN: 0960-1317; 1361-6439 Keywords: Electrical and Electronic Engineering ; Mechanical Engineering ; Mechanics of Materials ; Electronic, Optical and Magnetic Materials Origination: Footnote: