Media type: E-Article Title: A fully integrated GaAs-based three-axis Hall magnetic sensor exploiting self-positioned strain released structures Contributor: Todaro, Maria T; Sileo, Leonardo; Epifani, Gianmichele; Tasco, Vittorianna; Cingolani, Roberto; De Vittorio, Massimo; Passaseo, Adriana Published: IOP Publishing, 2010 Published in: Journal of Micromechanics and Microengineering, 20 (2010) 10, Seite 105013 Language: Not determined DOI: 10.1088/0960-1317/20/10/105013 ISSN: 0960-1317; 1361-6439 Keywords: Electrical and Electronic Engineering ; Mechanical Engineering ; Mechanics of Materials ; Electronic, Optical and Magnetic Materials Origination: Footnote: