Media type: E-Article Title: UV laser drilling of SiC for semiconductor device fabrication Contributor: Krüger, Olaf; Schöne, Gerd; Wernicke, Tim; John, Wilfred; Würfl, Joachim; Tränkle, Günther imprint: IOP Publishing, 2007 Published in: Journal of Physics: Conference Series Language: Not determined DOI: 10.1088/1742-6596/59/1/158 ISSN: 1742-6588; 1742-6596 Keywords: General Physics and Astronomy Origination: Footnote: Access State: Open Access