Media type: E-Article Title: 41.3: Invited Paper: Molybdenum Titanium based Sputter Targets for TFT Application Contributor: Hotz, Hendrik; Schmidt, Hennrik; Lorenz, Dominik; Scherer, Thomas; Linke, Christian; Koestenbauer, Harald; Winkler, Joerg imprint: Wiley, 2022 Published in: SID Symposium Digest of Technical Papers Language: English DOI: 10.1002/sdtp.15974 ISSN: 0097-966X; 2168-0159 Keywords: Applied Mathematics ; General Mathematics Origination: Footnote: