Media type: E-Article Title: In-situ diagnostics for plasma surface processing Contributor: Kroesen, G. M. W.; Hoog, F. J. imprint: Springer Science and Business Media LLC, 1993 Published in: Applied Physics A Solids and Surfaces Language: English DOI: 10.1007/bf00331399 ISSN: 0721-7250; 1432-0630 Keywords: General Materials Science ; General Chemistry ; Physics and Astronomy (miscellaneous) ; General Engineering ; General Materials Science Origination: Footnote: