Media type: E-Article Title: Arsenic doping in Si-MBE using low energy ion implantation (LEII) Contributor: Collart, E.J.H.; Gravesteijn, D.J.; Lathouwers, E.G.C.; Kersten, W.J. Published: Elsevier BV, 1995 Published in: Journal of Crystal Growth, 157 (1995) 1-4, Seite 349-352 Language: English DOI: 10.1016/0022-0248(95)00355-x ISSN: 0022-0248 Keywords: Materials Chemistry ; Inorganic Chemistry ; Condensed Matter Physics Origination: Footnote: