Media type: E-Article Title: Diffusion of phosphorus in TaSi2 thin films II: Lattice and short-circuit diffusion in TaSi2/SiO2 Contributor: Pelleg, Joshua imprint: Elsevier BV, 1983 Published in: Thin Solid Films Language: English DOI: 10.1016/0040-6090(83)90217-1 ISSN: 0040-6090 Keywords: Materials Chemistry ; Metals and Alloys ; Surfaces, Coatings and Films ; Surfaces and Interfaces ; Electronic, Optical and Magnetic Materials Origination: Footnote: