Media type: E-Article Title: Optimisation of SIMOX structures formed by ion beam synthesis Contributor: Reeson, K.J.; Stephens, K.G.; Hemment, P.L.F. imprint: Elsevier BV, 1989 Published in: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Language: English DOI: 10.1016/0168-583x(89)90188-2 ISSN: 0168-583X Keywords: Instrumentation ; Nuclear and High Energy Physics Origination: Footnote: