Media type: E-Article Title: Thermal oxidation of silicon: New experimental results and models Contributor: Irene, Eugene A.; Ghez, R. Published: Elsevier BV, 1987 Published in: Applied Surface Science, 30 (1987) 1-4, Seite 1-16 Language: English DOI: 10.1016/0169-4332(87)90067-5 ISSN: 0169-4332 Origination: Footnote: