Media type: E-Article Title: Plasma supported processing with high-average-power infrared-lasers Contributor: Hugenschmidt, Manfred; Schmitt, Rüdiger Published: Elsevier BV, 1995 Published in: Infrared Physics & Technology, 36 (1995) 1, Seite 159-170 Language: English DOI: 10.1016/1350-4495(94)00062-p ISSN: 1350-4495 Keywords: Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: