Media type: E-Article Title: Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts Contributor: Jiguet, S.; Judelewicz, M.; Mischler, S.; Bertch, A.; Renaud, P. imprint: Elsevier BV, 2006 Published in: Microelectronic Engineering Language: English DOI: 10.1016/j.mee.2006.01.068 ISSN: 0167-9317 Keywords: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: