Media type: E-Article Title: Ion beam sputtering of germanium – Energy and angular distribution of sputtered and scattered particles Contributor: Feder, Rene; Bundesmann, Carsten; Neumann, Horst; Rauschenbach, Bernd Published: Elsevier BV, 2014 Published in: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 334 (2014), Seite 88-95 Language: English DOI: 10.1016/j.nimb.2014.05.009 ISSN: 0168-583X Origination: Footnote: