Media type: E-Article Title: Epitaxial Growth of High Quality n-type Silicon Foils in a Quasi-inline APCVD Reactor Contributor: Milenkovic, Nena; Rachow, Thomas; Janz, Stefan; Reber, Stefan Published: Elsevier BV, 2015 Published in: Energy Procedia, 77 (2015), Seite 613-618 Language: English DOI: 10.1016/j.egypro.2015.07.088 ISSN: 1876-6102 Origination: Footnote: Access State: Open Access