Media type: E-Article Title: A Compact CMOS Compatible micro-Pirani Vacuum Sensor with Wide Operating Range and Low Power Consumption Contributor: Piotto, Massimo; Del Cesta, Simone; Bruschi, Paolo Published: Elsevier BV, 2016 Published in: Procedia Engineering, 168 (2016), Seite 766-769 Language: English DOI: 10.1016/j.proeng.2016.11.275 ISSN: 1877-7058 Origination: Footnote: Access State: Open Access