• Media type: E-Article
  • Title: A Compact CMOS Compatible micro-Pirani Vacuum Sensor with Wide Operating Range and Low Power Consumption
  • Contributor: Piotto, Massimo; Del Cesta, Simone; Bruschi, Paolo
  • Published: Elsevier BV, 2016
  • Published in: Procedia Engineering, 168 (2016), Seite 766-769
  • Language: English
  • DOI: 10.1016/j.proeng.2016.11.275
  • ISSN: 1877-7058
  • Origination:
  • Footnote:
  • Access State: Open Access