Media type: E-Article Title: Study of interfacial adhesion energy of multilayered ULSI thin film structures using four-point bending test Contributor: Gan, Zhenghao; Mhaisalkar, S.G.; Chen, Zhong; Zhang, Sam; Chen, Zhe; Prasad, K. imprint: Elsevier BV, 2005 Published in: Surface and Coatings Technology Language: English DOI: 10.1016/j.surfcoat.2004.10.036 ISSN: 0257-8972 Keywords: Materials Chemistry ; Surfaces, Coatings and Films ; Surfaces and Interfaces ; Condensed Matter Physics ; General Chemistry Origination: Footnote: