Media type: E-Article Title: Deposition of dense and smooth Ti films using ECR plasma-assisted magnetron sputtering Contributor: Zhang, Lei.; Shi, L.Q.; He, Z.J.; Zhang, B.; Lu, Y.F.; Liu, A.; Wang, B.Y. Published: Elsevier BV, 2009 Published in: Surface and Coatings Technology, 203 (2009) 22, Seite 3356-3360 Language: English DOI: 10.1016/j.surfcoat.2009.04.022 ISSN: 0257-8972 Origination: Footnote: