Media type: E-Article Title: Etch characteristics of gallium indium zinc oxide thin films in a HBr/Ar plasma Contributor: Kim, Eun Ho; Xiao, Yu Bin; Kong, Seon Mi; Chung, Chee Won Published: Elsevier BV, 2010 Published in: Surface and Coatings Technology, 205 (2010), Seite S252-S256 Language: English DOI: 10.1016/j.surfcoat.2010.07.084 ISSN: 0257-8972 Keywords: Materials Chemistry ; Surfaces, Coatings and Films ; Surfaces and Interfaces ; Condensed Matter Physics ; General Chemistry Origination: Footnote: