Media type: E-Article Title: Interpretation of scanning capacitance microscopy for thin oxides characterization Contributor: Ligor, O.; Gautier, B.; Descamps-Mandine, A.; Albertini, D.; Baboux, N.; Militaru, L. Published: Elsevier BV, 2009 Published in: Thin Solid Films, 517 (2009) 24, Seite 6721-6725 Language: English DOI: 10.1016/j.tsf.2009.05.026 ISSN: 0040-6090 Keywords: Materials Chemistry ; Metals and Alloys ; Surfaces, Coatings and Films ; Surfaces and Interfaces ; Electronic, Optical and Magnetic Materials Origination: Footnote: