Media type: E-Article Title: Low temperature atomic layer deposition of noble metals using ozone and molecular hydrogen as reactants Contributor: Hämäläinen, Jani; Puukilainen, Esa; Sajavaara, Timo; Ritala, Mikko; Leskelä, Markku Published: Elsevier BV, 2013 Published in: Thin Solid Films, 531 (2013), Seite 243-250 Language: English DOI: 10.1016/j.tsf.2013.01.091 ISSN: 0040-6090 Origination: Footnote: