Media type: E-Article Title: Gas phase and surface kinetic schemes for metal organic chemical vapor deposition processes: a theoretical perspective Contributor: Cavallotti, Carlo; Masi, Maurizio; Carrà, Sergio imprint: Elsevier BV, 2000 Published in: Materials Chemistry and Physics Language: English DOI: 10.1016/s0254-0584(00)00320-5 ISSN: 0254-0584 Keywords: Condensed Matter Physics ; General Materials Science Origination: Footnote: