Media type: E-Article Title: Two dimensional boron diffusion determination by scanning capacitance microscopy Contributor: Giannazzo, F.; Raineri, V.; Priolo, F. Published: Elsevier BV, 2002 Published in: Materials Science and Engineering: B, 91-92 (2002), Seite 220-223 Language: English DOI: 10.1016/s0921-5107(01)00999-0 ISSN: 0921-5107 Keywords: Mechanical Engineering ; Mechanics of Materials ; Condensed Matter Physics ; General Materials Science Origination: Footnote: