• Media type: E-Article
  • Title: Environment-controlled sol–gel soft-NIL processing for optimized titania, alumina, silica and yttria-zirconia imprinting at sub-micron dimensions
  • Contributor: Bottein, Thomas; Dalstein, Olivier; Putero, Magali; Cattoni, Andrea; Faustini, Marco; Abbarchi, Marco; Grosso, David
  • Published: Royal Society of Chemistry (RSC), 2018
  • Published in: Nanoscale, 10 (2018) 3, Seite 1420-1431
  • Language: English
  • DOI: 10.1039/c7nr07491c
  • ISSN: 2040-3364; 2040-3372
  • Origination:
  • Footnote:
  • Description: Metal oxide (MOX) surface nanopatterns can be prepared using Soft-Nano-Imprint-Lithography (soft-NIL) combined with sol–gel deposition processing.