Published in:
Nanoscale, 10 (2018) 3, Seite 1420-1431
Language:
English
DOI:
10.1039/c7nr07491c
ISSN:
2040-3364;
2040-3372
Origination:
Footnote:
Description:
Metal oxide (MOX) surface nanopatterns can be prepared using Soft-Nano-Imprint-Lithography (soft-NIL) combined with sol–gel deposition processing.