• Media type: E-Article
  • Title: Aluminium Implantation in Germanium: Uphill Diffusion, Electrical Activation, and Trapping
  • Contributor: Impellizzeri, Giuliana; Napolitani, Enrico; Boninelli, Simona; Privitera, Vittorio; Clarysse, Trudo; Vandervorst, Wilfried; Priolo, Francesco
  • imprint: IOP Publishing, 2012
  • Published in: Applied Physics Express
  • Language: English
  • DOI: 10.1143/apex.5.021301
  • ISSN: 1882-0778; 1882-0786
  • Keywords: General Physics and Astronomy ; General Engineering
  • Origination:
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