Media type: E-Article Title: Gas-Assisted Focused Ion Beam Etching of Indium–Tin Oxide Film Contributor: Lee, Ming-Kwei; Kuo, Kwei-Kuan Published: IOP Publishing, 2008 Published in: Japanese Journal of Applied Physics, 47 (2008) 1R, Seite 347 Language: Not determined DOI: 10.1143/jjap.47.347 ISSN: 0021-4922; 1347-4065 Keywords: General Physics and Astronomy ; General Engineering Origination: Footnote: