Media type: E-Article Title: An Advanced Finite Element Model for BiCMOS Process Oriented Ultra-Thin Wafer Deformation Contributor: Cao, Zhibo; Goritz, Alexander; Stocchi, Matteo; Wietstruck, Matthias; Hoyer, Christian; Steinweg, Luca David; Carta, Corrado; Ellinger, Frank; Tillack, Bernd; Kaynak, Mehmet imprint: Institute of Electrical and Electronics Engineers (IEEE), 2022 Published in: IEEE Transactions on Semiconductor Manufacturing Language: Not determined DOI: 10.1109/tsm.2021.3132550 ISSN: 0894-6507; 1558-2345 Keywords: Electrical and Electronic Engineering ; Industrial and Manufacturing Engineering ; Condensed Matter Physics ; Electronic, Optical and Magnetic Materials Origination: Footnote: