Media type: E-Article Title: Design and Test of a High-Sensitivity MEMS Capacitive Resonator for Photoacoustic Gas Detection Contributor: Yin, Yonggang; Ren, Danyang; Wang, Yuqi; Gao, Da; Shi, Junhui imprint: Institute of Electrical and Electronics Engineers (IEEE), 2024 Published in: IEEE Sensors Journal Language: Not determined DOI: 10.1109/jsen.2024.3366520 ISSN: 1558-1748; 2379-9153; 1530-437X Keywords: Electrical and Electronic Engineering ; Instrumentation Origination: Footnote: