Media type: E-Article Title: Oxidation resistance and microstructure of ruthenium-capped extreme ultraviolet lithography multilayers Contributor: Bajt, Saša imprint: SPIE-Intl Soc Optical Eng, 2006 Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Language: English DOI: 10.1117/1.2201027 ISSN: 1932-5150 Keywords: Electrical and Electronic Engineering ; Mechanical Engineering ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: