Media type: Electronic Conference Proceeding Title: ArF resist for contact hole application Contributor: Chen, K. Rex; Lawson, Margaret C.; Hughes, Timothy; Brunsvold, William R.; Varanasi, Pushkara R.; Keller, Robin; Jordhamo, George M. imprint: SPIE, 2001 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.436910 ISSN: 0277-786X Origination: Footnote: