Media type: Electronic Conference Proceeding Title: Processing multilayer systems using femtosecond, picosecond, and nanosecond laser pulses at different wavelengths Contributor: Ashkenasi, David; Rosenfeld, Arkadi imprint: SPIE, 2002 Published in: Photon Processing in Microelectronics and Photonics Extent: Language: Not determined DOI: 10.1117/12.470619 ISSN: 0277-786X Origination: Footnote: